Empowering Advanced Processes ‧ Driving Core Semiconductor Applications
Combining in-depth process expertise with strong customization and troubleshooting capabilities to serve as a trusted R&D and manufacturing partner, we deliver comprehensive technical support in the following areas:
Critical Component CIP Optimization & Customization Services
For CMP polishing head components and ECP plating cell components:
- Geometric and Structural Optimization
- Material Selection and Physical Property Modification
- Surface Property Enhancement
In-House Developed High-Precision Process Optimization Equipment
- Forseti Leak Rate Test Fixture: Enables offline leak testing of polishing heads to verify airtightness and ensure stable on-tool performance.
- Chronos Pressure Sustain Fixture: Performs pressure-holding and stress-relief conditioning on polishing heads prior to tool installation, helping achieve the target profile with precision during on-tool operation.
Troubleshooting & Failure Analysis
- Issue Diagnosis & Corrective Action Recommendations: Promptly investigates operational abnormalities in production line components, identifies root causes, and provides effective corrective solutions.
- High-Precision Measurement Services: Utilizes in-house high-precision metrology equipment, including a Coordinate Measuring Machine (CMM), to support precision data verification and component analysis.